Slot die coating apparatus

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United States of America Patent

PATENT NO 9682395
SERIAL NO

14432106

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present application relates to a slot die coating apparatus and, more particularly, to a slot die coating apparatus which can ensure the coating stability of a substrate film by reducing pressure oscillations within a vacuum chamber when slot die coating is carried out. The slot die coating apparatus according to the present application can effectively dampen pressure oscillations within a vacuum chamber by connecting a pressure oscillation reducing tank to the vacuum chamber and thus can ensure the coating stability of a substrate film, resulting in a reduction in the proportion of defective products.

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Patent Owner(s)

  • LG CHEM, LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Im, Ye Hoon Daejeon, KR 73 516
Park, Won Chan Daejeon, KR 10 22
Yeo, Jung Hyun Daejeon, KR 2 5

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