Active cliche for large-area printing, manufacturing method of the same, and printing method using the same
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United States of America Patent
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Mar 29, 2016
Grant Date -
Oct 1, 2015
app pub date -
Jun 12, 2015
filing date -
Sep 5, 2012
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Provided are a large-area nano-scale active printing device, a fabricating method of the same, and a printing method using the same. The printing device may include a substrate, first interconnection lines extending along a first direction, on the substrate, an interlayered dielectric layer provided on the first interconnection lines to have holes partially exposing the first interconnection lines, second interconnection lines provided adjacent to the holes in the interlayered dielectric layer to cross the first interconnection lines, and wedge-shaped electrodes provided at intersections with the first and second interconnection lines and connected to the first interconnection lines. The wedge-shaped electrodes protrude upward at centers of the holes.
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