Substrate Tray and Substrate Processing Apparatus Including Same
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United States of America Patent
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Issued Date -
Oct 1, 2015
app pub date -
Nov 5, 2013
filing date -
Nov 7, 2012
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Abstract
Disclosed is a substrate tray which facilitates to realize a large size, and to prevent defects caused by sagging, and a substrate processing apparatus comprising the same, wherein the substrate tray may include a plurality of straps for supporting a plurality of substrates arranged in a first axis direction; and a support frame connected with the straps in a second axis direction being perpendicular to the first axis direction, wherein a length in each of the straps is larger than a length of the substrate with respect to the second axis direction.
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