MASS SPECTROSCOPE AND MASS SPECTROMETRY
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United States of America Patent
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Issued Date -
Oct 1, 2015
app pub date -
Nov 17, 2014
filing date -
Mar 27, 2014
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
According to an embodiment, a mass spectroscope has a chamber, a charged particle beam source, a laser beam source, a mass spectrograph, and an optical system. The chamber accommodates a sample. The charged particle beam source generates a charged particle beam and irradiates the sample with the charged particle beam, thereby discharging a neutral particle from the sample. The laser beam source irradiates the neutral particle with a laser beam. The mass spectrograph detects the neutral particle ionized by irradiation of the laser beam and analyzes a mass of the sample. The optical system controls a light path of the laser beam in such a manner that the laser beam enters a region into which the neutral particle is discharged.
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