UNIFORMLY DISTRIBUTED SELF-ASSEMBLED CONE-SHAPED PILLARS FOR HIGH EFFICIENCY SOLAR CELLS

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United States of America Patent

SERIAL NO

14723095

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Abstract

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A method for fabricating a photovoltaic device includes applying a diblock copolymer layer on a substrate and removing a first polymer material from the diblock copolymer layer to form a plurality of distributed pores. A pattern forming layer is deposited on a remaining surface of the diblock copolymer layer and in the pores in contact with the substrate. The diblock copolymer layer is lifted off and portions of the pattern forming layer are left in contact with the substrate. The substrate is etched using the pattern forming layer to protect portions of the substrate to form pillars in the substrate such that the pillars provide a radiation absorbing structure in the photovoltaic device.

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GLOBALFOUNDRIES INCPO BOX 309 UGLAND HOUSE GRAND CAYMAN KY1-1104

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
DIMITRAKOPOULOS, CHRISTOS BALDWIN PLACE, US 20 163
HONG, AUGUSTIN J WHITE PLAINS, US 63 990
KIM, JEEHWAN WHITE PLAINS, US 247 1233
SADANA, DEVENDRA K PLEASANTVILLE, US 897 9950
SHIU, KUEN-TING WHITE PLAINS, US 122 770

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