Piezoelectric element, liquid ejecting head, liquid ejecting apparatus, and sensor

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United States of America Patent

PATENT NO 9252353
APP PUB NO 20150280103A1
SERIAL NO

14671292

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Abstract

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A piezoelectric element includes a first electrode; a seed layer comprised of a composite oxide having a perovskite structure and preferentially oriented to a (100) plane, the seed layer including bismuth in an A site and including iron and titanium in a B site, the seed layer having a thickness of less than 20 nm; a piezoelectric layer provided on the seed layer, the piezoelectric layer consisting of a piezoelectric material having a perovskite structure and preferentially oriented to a (100) plane; and a second electrode provided on the piezoelectric layer.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kobayashi, Tomokazu Shiojiri, JP 35 201
Morozumi, Koichi Shiojiri, JP 34 73

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