Acoustic resonator device including trench for providing stress relief

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United States of America Patent

PATENT NO 9876483
SERIAL NO

14229205

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Abstract

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An microelectronic device includes a substrate, a piezoelectric component formed over the substrate, at least one trench formed in the substrate. The piezoelectric component has a corresponding resonance frequency. The at least one trench is configured to reduce mechanical stress on the piezoelectric component, in response to force applied to the substrate, for stabilizing the resonance frequency.

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Patent Owner(s)

  • AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bi, Frank Fort Collins, US 8 149
Ortiz, Steven M Fort Collins, US 1 12
Small, Martha K Fort Collins, US 8 116
Sridaran, Suresh Fort Collins, US 11 113

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