METHOD FOR PRODUCING OZONE GAS-DISSOLVED WATER AND METHOD FOR CLEANING ELECTRONIC MATERIAL
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United States of America Patent
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Oct 22, 2015
app pub date -
Oct 10, 2013
filing date -
Nov 1, 2012
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Abstract
A method for producing ozone gas-dissolved water includes a process in which a mixed gas of an ozone gas and an oxygen gas and degassed water are supplied to an ozone-dissolving section and the mixed gas is dissolved in the degassed water. The amount of the mixed gas supplied to the ozone-dissolving section is controlled such that the sum of the dissolved oxygen gas concentration of the degassed water and the increment of the dissolved oxygen gas concentration calculated from the amount of the oxygen gas in the mixed gas and the amount of the degassed water on the assumption that ozone in the mixed gas entirely decomposes into oxygen is less than or equal to the saturated solubility of the oxygen gas under conditions using the obtained ozone gas-dissolved water.
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