Importance

Loading Importance Indicators...

Abstract

An evaporation cell for evaporating a material onto a substrate placed in a vacuum deposition chamber, includes an inner enclosure delimiting an evaporation chamber for receiving a crucible containing the material and having an opening for inserting the crucible into the evaporation chamber; evaporation elements placed at the periphery of the inner enclosure for placing the crucible in evaporation conditions; an injection duct for transporting a flow of vapour of the evaporated material from the evaporation chamber to an injector located in the vacuum deposition chamber; and a stop valve placed on the injection duct. The evaporation cell includes insertion opening/shutting elements that have an open configuration for inserting the crucible into the evaporation chamber, and a closed configuration for confining the evaporation chamber in communication with the vacuum deposition chamber via the injection duct, and opening elements to provide an evaporation opening in an envelope of the crucible.

Loading the Abstract Image...

First Claim