MECHANICAL RESONATOR SENSOR
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United States of America Patent
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Dec 12, 2013
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Dec 20, 2012
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Abstract
A transducer is disclosed for detecting a property of a fluid such as pressure, using a mechanical resonator having a resonant frequency dependent upon the fluid property. The transducer also has a temperature sensing optical cavity with an optical path difference which varies in correspondence with changes in temperature of the transducer.
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