ANTIREFLECTIVE COATING COMPOSITIONS AND PROCESSES THEREOF

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United States of America Patent

APP PUB NO 20150309403A1
SERIAL NO

14264766

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Abstract

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The present invention relates to a novel absorbing antireflective coating composition comprising a novel crosslinkable polymer comprising at least one repeat unit (A) having structure (1), at least repeat (B) unit having a structure (2), and at least one repeat unit (C) having structure (3)

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Patent Owner(s)

Patent OwnerAddress
AZ ELECTRONIC MATERIALS (LUXEMBOURG) S A R L2 AVENUE CHARLES DE GAULLE LUXEMBOURG L-1653

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ANYADIEGWU, Clement Parlin, US 13 136
DIOSES, Alberto D Doylestown, US 10 156
KUDO, Takanori Bedminster, US 41 577
MCKENZIE, Douglas Easton, US 30 327
Mullen, Salem K Florham Park, US 17 200
PADMANABAN, Munirathna Bridgewater, US 55 936
RAHMAN, M Dalil Flemington, US 91 862

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