SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
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United States of America Patent
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Oct 29, 2015
app pub date -
Jan 9, 2015
filing date -
Apr 24, 2014
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Abstract
A method of manufacturing a semiconductor CMOS device is provided. The method includes providing a semiconductor substrate, forming a first fin in a PMOS region and a second fin in an NMOS region of the semiconductor substrate, forming shallow trench isolation structures on the semiconductor substrate on opposite sides of the first and second fins, and performing ion implantation so as to implant germanium atoms into the first fin to form a silicon-germanium layer in the PMOS region. The silicon-germanium layer is used to adjust a work function of the PMOS region. The method further includes forming a stack structure in the PMOS region and the NMOS region, whereby the stack structure comprises a work function layer and a metal gate.
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