MEMS STRUCTURE, ELECTRONIC APPARATUS, AND MOVING OBJECT
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United States of America Patent
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Issued Date -
Nov 5, 2015
app pub date -
Apr 28, 2015
filing date -
May 1, 2014
priority date (Note) -
Abandoned
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Abstract
A MEMS structure includes: a substrate; a lower electrode disposed above the substrate; an upper electrode including a movable portion disposed facing and spaced from the lower electrode; and a projection projecting from a surface of the movable portion on a side facing the lower electrode, the projection being composed of a material different from that of the movable portion.
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