Method and control unit for operating a plasma generation apparatus

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United States of America Patent

PATENT NO 9756713
APP PUB NO 20150319834A1
SERIAL NO

14648426

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Abstract

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The invention relates to a method and to a control unit for operating the plasma generation apparatus.

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Patent Owner(s)

Patent OwnerAddress
OERLIKON METCO AGRIGACKERSTRASSE 16 WOHLEN CH-5610

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Friedery, Albert Berlingen, CH 1 0
Groeber, Rene Dintikon, CH 1 0
Koschnitzke, Hartmut Winterthur, CH 1 0
Liechti, Florian Meisterschwanden, CH 1 0

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