Nitride semiconductor wafer, nitride semiconductor element, and method for manufacturing nitride semiconductor wafer

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9362115
APP PUB NO 20150325428A1
SERIAL NO

14805141

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A nitride semiconductor wafer includes a silicon substrate, a first layer, a second layer, a third layer, a fourth layer, a fifth layer, and a sixth layer. The first layer is provided on the silicon substrate. The second layer is provided on the first layer. The third layer is provided on the second layer. The fourth layer is provided on the third layer. The fifth layer is provided on the fourth layer. The sixth layer is provided on the fifth layer. A composition ratio x4 of the fourth layer decreases in a first direction from the third layer toward the fifth layer. A maximum value of the composition ratio x4 is not more than a composition ratio of the third layer. A minimum value of the composition ratio x4 is not less than a composition ratio of the fifth layer.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • KABUSHIKI KAISHA TOSHIBA

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kaneko, Kei Kanagawa-ken, JP 67 526
Katsuno, Hiroshi Ishikawa-ken, JP 96 1184
Kushibe, Mitsuhiro Tokyo, JP 51 581
Ohba, Yasuo Kanagawa-ken, JP 82 1777
Tajima, Jumpei Tokyo, JP 54 58
Yamada, Shinji Ishikawa-ken, JP 141 1391

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Dec 7, 2023
11.5 Year Payment $7400.00 $3700.00 $1850.00 Dec 7, 2027
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00