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Abstract

One or more vibration plate layers of a diaphragm part are formed by a thin film forming technique. When a resonance frequency in a resonance vibration mode calculated from dimensions of a structure of an angular velocity sensor and an elastic parameter of a material thereof is defined as f kilohertz, a mass of a weight part is defined as M milligrams, a circumference of the diaphragm part is defined as r meters, a stress applied to a piezoelectric layer is defined as σ_p pascals, a thickness thereof is defined as t_p meters, a stress applied to an n-th layer from the weight part in a vibration plate portion constituted by a plurality of layers including a lower electrode and the vibration plate layers is defined as σ_n pascals, and a thickness thereof is defined as t_n meters (where n is a natural number), T_eff expressed by T_eff=r(σ_pt_p+Σσ_nt_n)/M satisfies {(−0.36f²+210)/33}≦T_eff≦{(0.44f²+210)/33}.

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First Claim