Elastic wave element with interdigital transducer electrode

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United States of America Patent

PATENT NO 9748924
SERIAL NO

14809994

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Abstract

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An elastic wave device includes an interdigital transducer (IDT) electrode in contact with a piezoelectric substrate having a bus bar electrode region including one of a first bus bar electrode and a second bus bar electrode of the IDT electrode, an alternately disposed region where first electrode fingers are alternately disposed with second electrode fingers of the IDT electrode, and an intermediate region including one of the first electrode fingers and the second electrode fingers. A dielectric film is formed in at least part of the intermediate region and in contact with an upper surface of the IDT electrode. The dielectric film includes a medium in which an acoustic velocity of a transverse wave propagating in the dielectric film is lower than an acoustic velocity of a main elastic wave of the alternately disposed region. The dielectric film is not formed in the alternately disposed region.

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Patent Owner(s)

  • SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujiwara, Joji Osaka-Fu, JP 57 676
Komatsu, Tomoya Osaka-Fu, JP 57 396
Nakamura, Hiroyuki Osaka-Fu, JP 526 4354
Nakanishi, Hidekazu Osaka-Fu, JP 40 528
Tsurunari, Tetsuya Osaka-Fu, JP 50 801

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