METHOD FOR PRODUCING LAYERED POLISHING PADS
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United States of America Patent
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Issued Date -
Nov 26, 2015
app pub date -
Oct 18, 2013
filing date -
Dec 26, 2012
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Abandoned
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Abstract
The present invention relates to a method for producing a layered circular polishing pad, comprising steps of forming, in a circular polishing sheet, concentric grooves and an outer circumferential region having a width of ½ or more of a groove pitch of the concentric grooves; and bonding the circular polishing sheet and a supporting layer to each other with a bonding member interposed therebetween to produce a layered polishing sheet. According to the present invention, it is possible to provide a method for producing a layered circular polishing pad in which the polishing layer and the supporting layer are not easily peeled from each other.
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