Importance

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Abstract

Provided is an ultrapure water producing apparatus equipped with fewer reverse osmosis membrane separation units. The ultrapure water producing apparatus includes a primary water purification system 2 and a subsystem 3 configured to treat water treated by the primary water purification system 2. A reverse osmosis membrane separation unit is provided in at least the primary water purification system 2. The reverse osmosis membrane separation unit installed in the primary water purification system 2 is a high-pressure reverse osmosis membrane separation unit installed in a single stage. The high-pressure reverse osmosis membrane separation unit has a standard operating pressure of 5.52 MPa, a pure water flux of 0.5 m³/m²·D or more, and a NaCl rejection of 99.5% or more (32,000 mg/L NaCl).

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First Claim