USE OF AN ETCH STOP IN THE MIM CAPACITOR DIELECTRIC OF A MMIC
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United States of America Patent
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Issued Date -
Dec 10, 2015
app pub date -
Jun 6, 2014
filing date -
Jun 6, 2014
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A structure having; a body; a pair of capacitors disposed over different portions of a surface of the body; a first one of the capacitors having an upper conductor and a lower conductor separated a dielectric layer; and a second one of the pair of capacitors having an upper conductor and a lower conductor separated a dielectric structure, the dielectric structure having a lower dielectric layer, and an upper dielectric layer, wherein the material of the lower dielectric layer is different from the material of the upper dielectric layer.
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