SUBSTRATE FOR ELECTRONIC DEVICE PACKAGE, ELECTRONIC DEVICE PACKAGE, ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE

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United States of America Patent

APP PUB NO 20150357254A1
SERIAL NO

14730703

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Abstract

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A base substrate includes a first layer which is a ceramic layer; a second layer which is disposed on one surface side of the first layer, and contains at least one of a glass layer, a silicon layer, and a quartz layer; and a concave portion that is opened on a side of the second layer opposite to the first layer. In addition, the concave portion is formed through etching.

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Patent Owner(s)

Patent OwnerAddress
SEIKO EPSON CORPORATION1-6 SHINJUKU 4-CHOME SHINJUKU-KU TOKYO 160-8801

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
MIKAMI, Masaru Kochi, JP 17 85

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