CHEMICAL SENSOR ARRAYS FOR ODOR DETECTION
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United States of America Patent
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Issued Date -
Dec 17, 2015
app pub date -
Feb 5, 2013
filing date -
Feb 5, 2013
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Abstract
An array of semiconductor chemical sensors and a method for manufacturing the array of semiconductor chemical sensors are disclosed. In some examples, the method may include providing a semiconductor substrate including a plurality of areas, and ejecting onto each area of the semiconductor substrate a solution including at least one modification material for modifying each area of the semiconductor substrate.
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