SEMICONDUCTOR GAS SENSOR DEVICE AND MANUFACTURING METHOD THEREOF
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United States of America Patent
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app pub date -
May 29, 2015
filing date -
Jun 30, 2014
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Abstract
A semiconductor gas sensor device includes a first cavity that is enclosed by opposing first and second semiconductor substrate slices. At least one conducting filament is provided to extend over the first cavity, and a passageway is provided to permit gas to enter the first cavity. The sensor device may further including a second cavity that is hermetically enclosed by the opposing first and second semiconductor substrate slices. At least one another conducting filament is provided to extend over the second cavity.
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