Strain detection element, pressure sensor, microphone, blood pressure sensor, and touch panel
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United States of America Patent
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Aug 14, 2018
Grant Date -
Jan 14, 2016
app pub date -
Jun 30, 2015
filing date -
Jul 2, 2014
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A strain detection element is provided above a deformable membrane. Moreover, this strain detection element includes an electrode and a stacked body, the stacked body including: a first magnetic layer whose magnetization direction is variable according to a deformation of the membrane; a second magnetic layer provided facing the first magnetic layer; and an intermediate layer provided between these first magnetic layer and second magnetic layer, and at least part of the first magnetic layer is amorphous, and the electrode includes a metal layer configured from a Cu—Ag alloy.
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