Importance

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Abstract

A measurement apparatus may include: an irradiating unit configured to shape at least one terahertz wave and irradiate first and second surfaces of the object with the at least one shaped terahertz wave; a positional information acquiring unit configured to acquire positional information on a measurement area of the at least one shaped terahertz wave; and a position adjusting unit configured to relatively adjust a converging position of the at least one shaped terahertz wave and a position of the object in a depth direction of the object on a basis of the acquired positional information, which may be acquired by using relationship information indicating a relationship between positions of the first and second surfaces and intensities or beam propagation shapes of at least one first pulse and at least one second pulse of the at least one terahertz wave reflected respectively from the first and second surfaces.

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First Claim