SYSTEMS AND METHODS FOR PRODUCING ENERGETIC NEUTRALS
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United States of America Patent
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Jan 14, 2016
app pub date -
Jun 16, 2015
filing date -
Jul 14, 2014
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Abstract
Systems and methods for producing energetic neutrals include a remote plasma generator configured to generate plasma in a plasma region. An ion extractor is configured to extract high energy ions from the plasma. A substrate support is arranged in a processing chamber and is configured to support a substrate. A neutral extractor and gas dispersion device is arranged between the plasma region and the substrate support. The neutral extractor and gas dispersion device is configured to extract energetic neutrals from the high energy ions, to supply the energetic neutrals to the substrate and to disperse precursor gas into the processing chamber.
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