CAPACITOR AND METHOD OF MANUFACTURING THE SAME
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United States of America Patent
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app pub date -
Sep 21, 2015
filing date -
Apr 9, 2014
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Abandoned
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Abstract
A capacitor includes a substrate, a multilayer over the substrate, a plurality of container-shaped storage node structures on the semiconductor substrate and surrounded by the multilayer, the storage node structure has a sidewall extending upwardly from the base to the top, where the sidewall includes an upper segment and a lower segment thinner than the upper segment, a capacitor dielectric material along a surface of each storage node structure, and a capacitor electrode material over the capacitor dielectric material.
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