Feeding device and object driving device
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United States of America Patent
Stats
-
Nov 1, 2016
Grant Date -
Jan 28, 2016
app pub date -
Sep 4, 2014
filing date -
Jul 24, 2014
priority date (Note) -
In Force
status (Latency Note)
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Abstract
To provide a feeding device capable of driving an object with high accuracy while holding the object and controlling its attitude and capable of improving durability by separating a holding device and a driving device from each other, and an object driving device. The feeding device movably disposed through a cover device to face a work region shielded by the cover device, for holding an object, includes: a first rotary saddle that is rotatable about a first axis; a second rotary saddle disposed on the first rotary saddle and rotatable about a second axis perpendicular to the first axis; a holding device that holds the object; a first driving device disposed outward of the cover device with regarding the work region to rotate the first rotary saddle; and second driving device disposed outward of the cover device with respect to the work region to rotate the second rotary saddle.
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