Pressure sensor with geter embedded in membrane

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9557238
APP PUB NO 20160025583A1
SERIAL NO

14340765

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Various exemplary embodiments relate to a pressure sensor including a pressure sensitive membrane suspended over a cavity, wherein the membrane is secured by a set of anchors to a substrate; and a getter material embedded in the membrane, wherein the surface of the getter is in contact with any gas within the cavity, and wherein two end points of the getter material are attached through the substrate by anchors capable of conducting through the substrate an electrical current through the getter material.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
AMS INTERNATIONAL AGZURICH51

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goossens, Martijn Eindhoven, NL 13 53
Oldsen, Marten Kleve, DE 14 59
Pijnenburg, Remco Eindhoven, NL 4 10
Steeneken, Peter Eindhoven, NL 9 20
van, der Avoort Casper Prinsenhof, DE 17 43

Cited Art Landscape

Patent Info (Count) # Cites Year
 
INVENSENSE, INC. (1)
* 2015/0158,720 INTEGRATED HEATER FOR GETTERING OR OUTGASSING ACTIVATION 2 2015
 
EMPIRE TECHNOLOGY DEVELOPMENT LLC (1)
2012/0006,096 GAS SENSOR USING NANOTUBES 3 2010
 
Teco Nanotech Co., Ltd. (1)
* 2010/0201,263 VACUUM DEGASSING BOX OF A FIELD EMISSION DISPLAY 1 2009
 
GENERAL ELECTRIC COMPANY (1)
2005/0262,943 Apparatus, methods, and systems to detect an analyte based on changes in a resonant frequency of a spring element 20 2004
 
ndd Medizintechnik AG (1)
5645071 Method for the measurement of the molar mass of gases or gas mixtures and an apparatus for the performance of the method 50 1995
 
MATERION CORPORATION (1)
6499354 Methods for prevention, reduction, and elimination of outgassing and trapped gases in micromachined devices 52 1999
 
Other [Check patent profile for assignment information] (2)
* 2001/0034,174 Fiber-based field emission display 1 2001
2005/0017,313 System and method of fabricating micro cavities 9 2003
 
SGS-THOMSON MICROELECTRONICS S.R.L. (1)
* 6527961 Method of manufacturing pressure microsensors 5 1998
 
E. I. DU PONT DE NEMOURS AND COMPANY (1)
* 2004/0206,239 Method for reducing gaseous contamination in a pressure vessel 1 2004
 
FLIR SYSTEMS, INC. (1)
8471206 Infrared detector vacuum test systems and methods 3 2009
 
FREESCALE SEMICONDUCTOR, INC. (1)
* 2014/0225,206 PRESSURE LEVEL ADJUSTMENT IN A CAVITY OF A SEMICONDUCTOR DIE 14 2013
 
INSTITUT NATIONAL D'OPTIQUE (1)
2012/0228,733 MEMS-BASED GETTER MICRODEVICE 4 2011
 
MICRON TECHNOLOGY, INC. (1)
5909202 Wire-bonded getter in an evacuated display and method of forming the same 4 1998
 
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. (1)
* 2013/0214,400 MICRO-ELECTRO MECHANICAL SYSTEMS (MEMS) STRUCTURES AND METHODS OF FORMING THE SAME 8 2012
 
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. (1)
* 2010/0025,845 MICROMECHANICAL HOUSING COMPRISING AT LEAST TWO CAVITIES HAVING DIFFERENT INTERNAL PRESSURE AND/OR DIFFERENT GAS COMPOSITIONS AND METHOD FOR THE PRODUCTION THEREOF 22 2007
 
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES (2)
2013/0192,372 RESONANT SENSOR MEASUREMENT DEVICE 2 2013
* 2015/0151,959 ENCAPSULATION STRUCTURE COMPRISING TRENCHES PARTIALLY FILLED WITH GETTER MATERIAL 2 2014
 
BALLY GAMING, INC. (1)
6645071 Casino bonus game using player strategy 104 2001
 
Sensonor ASA (1)
* 2003/0085,438 Micro-mechanical device and method for producing the same 14 2002
 
AMS INTERNATIONAL AG (1)
8256298 MEMS pressure sensor 7 2010
 
ROBERT BOSCH GMBH (4)
* 6521965 Integrated pressure sensor 26 2000
* 2013/0334,622 MICROMECHANICAL DEVICE AND METHOD FOR MANUFACTURING A MICROMECHANICAL DEVICE 1 2013
* 2016/0137,493 MEMS DEVICE HAVING A GETTER 1 2014
* 2015/0353,346 Component including two semiconductor elements between which at least two hermetically tightly sealed cavities having different internal pressures are formed and method for manufacturing such a component 1 2015
 
CARNEGIE MELLON UNIVERSITY (1)
2004/0197,227 MEMS membrane based sensor 3 2003
 
Composite Materials Technology, Inc. (1)
* 4925741 Getter wire 12 1989
 
CASIO COMPUTER CO., LTD. (1)
* 2008/0241,020 Reacting apparatus comprising a plurality of reactors 3 2008
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
2006/0131,501 Method for fabricating the same 14 2006
* Cited By Examiner

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