Method and apparatus for calibrating sensors that detect wafer protrusion from a wafer cassette

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United States of America Patent

PATENT NO 9348057
APP PUB NO 20160025893A1
SERIAL NO

14340060

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A calibration gauge, an apparatus and a method for calibrating sensors that detect wafer protrusion from a wafer cassette using the calibration gauge. The calibration gauge includes a disk having a first region which is a circular sector of central angle A1 having a constant radius R1 about a center and an integral second region of increasing radius about the center, the increasing radius increasing from R1 to R2 through a central angle A2, wherein R2 is greater than R1 and A1+A2 equals 360°.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bandy, John J Cambridge, US 4 5
Bates, Graham M Waterbury, US 9 23
Mahan, Bradley M Burlington, US 3 2

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