Liquid discharge apparatus, imprint apparatus, and article manufacturing method

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United States of America Patent

PATENT NO 9952506
SERIAL NO

14803153

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Abstract

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A liquid discharge apparatus includes: a container divided by a dividing member into a first chamber configured to contain a first liquid to be discharged from a discharge port and a second chamber configured to contain a second liquid; a supply unit configured to supply the second liquid into the second chamber in accordance with decrease of the first liquid contained in the first chamber; and a measurement unit configured measure flow of the first liquid into the second chamber.

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Patent Owner(s)

  • CANON KABUSHIKI KAISHA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arai, Tsuyoshi Utsunomiya, JP 113 700
Mita, Yutaka Utsunomiya, JP 18 59
Saku, Tomonobu Utsunomiya, JP 3 17

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