Back-end electrically programmable fuse

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9893011
SERIAL NO

14872627

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Abstract

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A BEOL e-fuse is disclosed which reliably blows in the via and can be formed even in the tightest pitch BEOL layers. The BEOL e-fuse can be formed utilizing a line first dual damascene process to create a sub-lithographic via to be the programmable link of the e-fuse. The sub-lithographic via can be patterned using standard lithography and the cross section of the via can be tuned to match the target programming current.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bao, Junjing San Diego, US 99 513
Bonilla, Griselda Fishkill, US 107 1075
Chanda, Kaushik San Jose, US 65 818
Choi, Samuel S Beacon, US 48 408
Filippi, Ronald G Wappingers Falls, US 99 1178
Grunow, Stephan Saratoga, US 54 913
Lustig, Naftali E Croton on Hudson, US 59 1489
Moy, Dan Bethel, US 33 772
Simon, Andrew H Fishkill, US 104 1612

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