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Abstract

A silicon-based sensor with an integrated multilayer metal-dielectric filter coating for providing a UV transmission curve of interest is disclosed. The sensor includes a silicon-based photodiode and a filter coating integrated with the silicon-based photodiode and comprising a plurality of filter pairs stacked over the silicon-based photodiode. Each filter pair comprises a dielectric layer and a metal layer. The dielectric layers and the metal layers of the plurality of filter pairs are stacked in an alternating fashion. A thickness of the metal layer in at least one filter pair is different from a thickness of the metal layer in at least one other filter pair. A thickness of the dielectric layer in at least one filter pair is different from a thickness of the dielectric layer in at least one other filter pair.

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