Surface acoustic wave device including first and second wiring electrodes crossing three-dimensionally
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United States of America Patent
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Sep 13, 2016
Grant Date -
Feb 4, 2016
app pub date -
Oct 14, 2015
filing date -
Apr 18, 2013
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A surface acoustic wave device includes, on a substrate, functional electrode units each including at least one IDT electrode, wiring electrodes connected to the functional electrode units, insulation films provided between the wiring electrode and the substrate, and a support member that surrounds the functional electrode units and at least a portion of the wiring electrodes. A thickness of the support member is larger than a thickness of the insulation films, and the insulation films and the support member are made of the same material.
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