Importance

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Abstract

A dispenser includes a frame, a substrate support assembly, and a gantry system to move a dispensing pump in x-axis, y-axis, and z-axis directions. The dispensing pump includes a local supply reservoir, a dispensing nozzle, a first line to provide fluid communication between the local supply reservoir and the dispensing nozzle. The dispenser further includes a remote bulk feed system coupled to the local supply reservoir of the dispensing pump. The bulk feed system includes a first remote supply container configured to contain viscous material, a second line to provide fluid communication between the remote bulk feed system and the local supply reservoir, and a first valve disposed in the second line and operable to deliver viscous material to and to cut off viscous material from the remote supply container.

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First Claim