WORKING CHAMBER
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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app pub date -
Oct 20, 2015
filing date -
Sep 30, 2013
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A working chamber includes: a body case including a work space; a supply device configured to supply gas in a body case; a work plate having an opening formed therein, the work plate configuring a bottom surface of the work space; and an observation device capable of being lifted and lowered, and the observation device includes a receiving portion having a width greater than a gap between the work plate and the observation device in an in-use state, and the receiving portion is configured to close the gap between the observation device and the work plate in the in-use state.
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