BIS(ALKYLIMIDO)-BIS(ALKYLAMIDO)MOLYBDENUM MOLECULES FOR DEPOSITION OF MOLYBDENUM-CONTAINING FILMS

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United States of America Patent

APP PUB NO 20160040289A1
SERIAL NO

14776503

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Abstract

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Bis(alkylimido)-bis(alkylamido)molybdenum compounds, their synthesis, and their use for the deposition of molybdenum-containing films are disclosed.

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Patent Owner(s)

Patent OwnerAddress
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDEPARIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
GATINEAU, Julien Seoul, KR 47 493
KO, Changhee Tsukuba, JP 12 137
LANSALOT-MATRAS, Clément Saint-Jammes, FR 40 107
YOKOTA, Jiro Tsukuba, JP 6 8

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