BIS(ALKYLIMIDO)-BIS(ALKYLAMIDO)MOLYBDENUM MOLECULES FOR DEPOSITION OF MOLYBDENUM-CONTAINING FILMS

United States of America Patent

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Issued Date
Feb 11, 2016
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Mar 12, 2014
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Mar 15, 2013

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Abstract

Bis(alkylimido)-bis(alkylamido)molybdenum compounds, their synthesis, and their use for the deposition of molybdenum-containing films are disclosed.

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Patent Owner	Address
L'AIR LIQUIDE SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GEORGES CLAUDE	75 QUAI D'ORSAY PARIS F-75007

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Inventor Name	Address	# of filed Patents	Total Citations
GATINEAU, Julien	Seoul, KR	48	2687
KO, Changhee	Tsukuba, JP	14	1053
LANSALOT-MATRAS, Clément	Saint-Jammes, FR	43	1652
YOKOTA, Jiro	Tsukuba, JP	8	319

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BIS(ALKYLIMIDO)-BIS(ALKYLAMIDO)MOLYBDENUM MOLECULES FOR DEPOSITION OF MOLYBDENUM-CONTAINING FILMS

Number of patents in Portfolio can not be more than 2000

United States of America Patent

14776503

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14776503

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