METHOD FOR PROCESSING A FLEXIBLE SUBSTRATE

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United States of America Patent

SERIAL NO

14817007

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Abstract

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A method of processing a flexible substrate includes providing a flexible substrate having a polymerized surface; emitting an electron beam; exposing the polymerized surface to the electron beam; modifying the polymerized surface by the exposure to the electron beam; and depositing a barrier layer on the modified surface.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HOFFMANN, Gerd Bruchkobel, DE 25 92
KLEMM, Günter Nidda, DE 3 9
LOTZ, Hans-Georg Grundau-Rothenbergen, DE 32 269
WOLFF, Alexander Alzenau, DE 5 28

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