Micro-fabricated integrated coil and magnetic circuit and method of manufacturing thereof

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9607748
APP PUB NO 20160064470A1
SERIAL NO

14476644

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Abstract

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A micro-fabricated electromagnetic device is provided for on-circuit integration. The electromagnetic device includes a core. The core has a plurality of electrically insulating layers positioned alternatingly between a plurality of magnetic layers to collectively form a continuous laminate having alternating magnetic and electrically insulating layers. The electromagnetic device includes a coil embedded in openings of the semiconductor substrate. An insulating material is positioned in the cavity and between the coil and an inner surface of the core. A method of manufacturing the electromagnetic device includes providing a semiconductor substrate having openings formed therein. Windings of a coil are electroplated and embedded in the openings. The insulating material is coated on or around an exposed surface of the coil. Alternating magnetic layers and electrically insulating layers may be micro-fabricated and electroplated as a single and substantially continuous segment on or around the insulating material.

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Patent Owner(s)

  • TELEDYNE SCIENTIFIC & IMAGING, LLC

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Borwick,, III Robert L Thousand Oaks, US 16 232
DeNatale, Jeffrey F Thousand Oaks, US 58 1129
Ganguli, Rahul Oak Park, US 35 347
Mehrotra, Vivek Simi Valley, US 53 1615
Mihailovich, Robert E Newbury Park, US 7 65
Papavasiliou, Alex P Thousand Oaks, US 1 5
Stupar, Philip A Oxnard, US 34 511

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