Method And Apparatus For Providing Temperature Control To A Cryopump
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United States of America Patent
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Issued Date -
Mar 10, 2016
app pub date -
Sep 11, 2015
filing date -
Jul 1, 2008
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Abandoned
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Abstract
Cryopump components are improved using thin layer heating elements for temperature control or to serve as heaters. These heating elements may be located and prevent pooling during regeneration. The temperature control may also be achieved through the use of ceramic heating elements. The ceramic heating elements may also include a second function of structural support within the cryopump. Temperature control may further be achieved via the radiation shield, where the radiation shield includes a clad sheeting or coating.
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