METHOD, DEVICE AND SYSTEM FOR ENRICHMENT OF NF3 GAS
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Mar 24, 2016
app pub date -
Sep 17, 2015
filing date -
Sep 24, 2014
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
Disclosed is a method for enrichment of NF3 gas, comprising: (a) feeding a gas mixture containing a low concentration of NF3 gas and impurities; and (b) passing the feed gas mixture through a non-porous membrane module, wherein an enriched NF3 gas mixture passing through the non-porous membrane module and an unenriched NF3 gas mixture failing to pass through the non-porous membrane module are separated depending on the differences in the kinetic diameters of the individual gases.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully