INTEGRATED ROTATION RATE AND ACCELERATION SENSOR AND METHOD FOR MANUFACTURING AN INTEGRATED ROTATION RATE AND ACCELERATION SENSOR

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20160084865A1
SERIAL NO

14890527

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A micromechanical device having a main plane of extension includes a sensor wafer, an evaluation wafer, and an intermediate wafer situated between the sensor wafer and the evaluation wafer, the evaluation wafer having at least one application-specific integrated circuit. The sensor wafer and/or the intermediate wafer includes a first sensor element and a second sensor element spatially separated from the first sensor element, the first and second sensor elements being respectively located in a first cavity and a second cavity each formed by the intermediate wafer and the sensor wafer, a first gas pressure in the first cavity differing from a second gas pressure in the second cavity, and the intermediate wafer having an opening at a point in a direction perpendicular to the main plane of extension.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
ROBERT BOSCH GMBHSTUTTGART GERMANY

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Classen, Johannes Reutlingen, DE 85 480
Kaelberer, Arnd Schlierbach, DE 22 140
Reinmuth, Jochen Reutlingen, DE 110 395

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation