Method for coating a substrate and coating device

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United States of America Patent

PATENT NO 10688524
APP PUB NO 20160089691A1
SERIAL NO

14861117

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Abstract

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A method for coating a substrate with a lacquer includes spraying lacquer onto the substrate and subsequently spraying the applied lacquer with solvent. In some embodiments, before the solvent is sprayed the lacquer is heated. Also disclosed is a corresponding coating device for lacquering substrates.

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Patent Owner(s)

Patent OwnerAddress
SUSS MICROTEC LITHOGRAPHY GMBHSCHLEISSHEIMER STRASSE 90 GARCHING 85748

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fischer, Katrin Stuttgart, DE 5 34
Kaneko, Kento Munich, DE 4 4
Palitschka, Florian Gauting, DE 4 6
Platen, Johannes Kevelaer-Wetten, DE 3 4

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