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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE	EPFL-TTO EPFL INNOVATION PARK J 1015 LAUSANNE

International Classification(s)

• G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
• G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....

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• [Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Merenda, Fabrice	Lausanne, CH	4	123
Rachet, Bastien	Lausanne, CH	22	179
Salathe, René	Ecublens, CH	4	112

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Sep 30, 2027

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2016/0091,799

HIGH-RESOLUTION MICROSCOPY AND PHOTOLITHOGRAPHY DEVICES USING FOCUSING MICROMIRRORS

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