Piezoelectric device, liquid ejecting head, liquid ejecting apparatus, and manufacturing method of piezoelectric device

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United States of America Patent

PATENT NO 9553251
APP PUB NO 20160101621A1
SERIAL NO

14875730

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A piezoelectric device includes a deformation portion, a non-deformation portion which hinders deformation of the elastic layer, and a piezoelectric element. The deformation portion includes a first area in which the piezoelectric element is disposed, a third area adjacent to the non-deformation portion, and a second area disposed between the first area and the third area. In the first area, the elastic layer, an insulation layer, the lower electrode layer, the piezoelectric layer, and the upper electrode layer are sequentially stacked. In the second area, the elastic layer, the insulation layer, the piezoelectric layer, and the upper electrode layer are sequentially stacked. In the third area, the elastic layer and the upper electrode layer are sequentially stacked. The elastic layer is silicon oxide, and impurities are added to the upper electrode layer in the silicon oxide in the third area.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hirai, Eiju Minowa-machi, JP 141 576
Hokari, Yoshihiro Azumino, JP 9 16
Naganuma, Yoichi Matsumoto, JP 53 116
Nakayama, Masao Shiojiri, JP 118 851
Saito, Takeshi Matsumoto, JP 395 6705

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