Controlled coating apparatus, systems, and methods
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United States of America Patent
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Aug 20, 2019
Grant Date -
Apr 14, 2016
app pub date -
Dec 21, 2015
filing date -
Mar 9, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
Apparatus and systems may operate to provide a first reactant as a gas that flows under reduced atmospheric pressure to interact with a surface, such as a tool body surface, the interaction confined to a passage within the tool body, wherein the passage includes the surface and extends without interruption from an entrance end of the passage to an exit end of the passage. Additional activity may include providing a second reactant as a gas under the reduced atmospheric pressure, subsequent to the first reactant, to interact with the surface of the tool body; and repeated provision of the first and second reactants until a selected coating thickness on the surface is formed. Additional apparatus, systems, and methods are disclosed.
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