Method and apparatus for diagnosing status of parts in real time in plasma processing equipment
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United States of America Patent
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Jan 10, 2017
Grant Date -
Apr 14, 2016
app pub date -
Dec 15, 2015
filing date -
Sep 4, 2007
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Abstract
Apparatus and methods for diagnosing status of a consumable part of a plasma reaction chamber, the consumable part including at least one conductive element embedded therein. The method includes the steps of: coupling the conductive element to a power supply so that a bias potential relative to the ground is applied to the conductive element; exposing the consumable part to plasma erosion until the conductive element draws a current from the plasma upon exposure of the conductive element to the plasma; measuring the current; and evaluating a degree of erosion of the consumable part due to the plasma based on the measured current.
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Patent Owner(s)
- I AM RESEARCH CORPORATION
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Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Patrick, Roger | Mountain View, US | 35 | 1479 |
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