POLISHING COMPOSITION

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United States of America Patent

APP PUB NO 20160108284A1
SERIAL NO

14890503

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An object of the present invention is to provide a means for improving a polishing rate and polishing selectivity of a phase-change compound.

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Patent Owner(s)

Patent OwnerAddress
FUJIMI INCORPORATED1-1 CHIRYO 2-CHOME NISHIBIWAJIMA-CHO KIYOSU-SHI AICHI 452-8502

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
YOSHIZAKI, Yukinobu Kiyosu-shi, Aichi, JP 28 75

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