Slot coater having fluid control unit
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United States of America Patent
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Mar 19, 2019
Grant Date -
Apr 28, 2016
app pub date -
Oct 20, 2015
filing date -
Oct 22, 2014
priority date (Note) -
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status (Latency Note)
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Abstract
Disclosed is a slot coater, which includes a feeding unit having a passage through which a coating fluid flows in, a manifold for accommodating the coating fluid supplied through the feeding unit, a discharge unit communicating with the manifold to discharge the coating fluid accommodated in the manifold, a plurality of shim plates arranged at regular intervals in a length direction of the manifold, and a temperature control unit for generating a temperature difference between a shim plate located relatively closer to the feeding unit and a shim plate located respectively farther from the feeding unit.
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